TY  - RPRT
TI  - High aspect ratio arrays of Si nano-pillars using displacement Talbot lithography and gas-MacEtch
AU  - Z. Shi
AU  - K. Jefimovs
AU  - M. Stampanoni
AU  - L. Romano
PY  - 2022
UR  - https://arxiv.org/abs/2209.13672
ID  - 2209.13672
ER  -