@misc{indiciae8407c5820573,
  title = {High Q-Factor Silicon Nitride Nanomechanical Resonators Fabricated by Maskless Femtosecond Laser Micro-machining},
  author = {Roghayeh Nikbakht and Xitong Xie and Arnaud Weck and Raphael St-Gelais},
  year = {2022},
  doi = {10.1116/5.0124150},
  url = {https://arxiv.org/abs/2210.00290},
  note = {Source identifier: 2210.00290}
}