TY  - RPRT
TI  - High Q-Factor Silicon Nitride Nanomechanical Resonators Fabricated by Maskless Femtosecond Laser Micro-machining
AU  - Roghayeh Nikbakht
AU  - Xitong Xie
AU  - Arnaud Weck
AU  - Raphael St-Gelais
PY  - 2022
DO  - 10.1116/5.0124150
UR  - https://arxiv.org/abs/2210.00290
ID  - 2210.00290
ER  -