@misc{indiciae64791af6841b,
  title = {Modeling Incomplete Conformality during Atomic Layer Deposition in High Aspect Ratio Structures},
  author = {Luiz Felipe Aguinsky and Frâncio Rodrigues and Tobias Reiter and Xaver Klemenschits and Lado Filipovic and Andreas Hössinger and Josef Weinbub},
  year = {2022},
  doi = {10.1016/j.sse.2022.108584},
  url = {https://arxiv.org/abs/2210.00749},
  note = {Source identifier: 2210.00749}
}