TY  - RPRT
TI  - Modeling Incomplete Conformality during Atomic Layer Deposition in High Aspect Ratio Structures
AU  - Luiz Felipe Aguinsky
AU  - Frâncio Rodrigues
AU  - Tobias Reiter
AU  - Xaver Klemenschits
AU  - Lado Filipovic
AU  - Andreas Hössinger
AU  - Josef Weinbub
PY  - 2022
DO  - 10.1016/j.sse.2022.108584
UR  - https://arxiv.org/abs/2210.00749
ID  - 2210.00749
ER  -