@misc{indiciae342d86286ba2,
  title = {Imaging Scatterometer for Observing In-Situ Changes to Optical Coatings During Air Annealing},
  author = {Michael Rezac and Daniel Martinez and Amy Gleckl and Joshua R. Smith},
  year = {2022},
  doi = {10.1364/ao.476979},
  url = {https://arxiv.org/abs/2210.03143},
  note = {Source identifier: 2210.03143}
}