TY - RPRT TI - Imaging Scatterometer for Observing In-Situ Changes to Optical Coatings During Air Annealing AU - Michael Rezac AU - Daniel Martinez AU - Amy Gleckl AU - Joshua R. Smith PY - 2022 DO - 10.1364/ao.476979 UR - https://arxiv.org/abs/2210.03143 ID - 2210.03143 ER -