TY  - RPRT
TI  - Ultra-tuning of nonlinear drumhead MEMS resonators by electro-thermoelastic buckling
AU  - Ali Kanj
AU  - Paolo F. Ferrari
AU  - Arend M. van der Zande
AU  - Alexander F. Vakakis
AU  - Sameh Tawfick
PY  - 2022
DO  - 10.1121/10.0015462
UR  - https://arxiv.org/abs/2210.06982
ID  - 2210.06982
ER  -