@misc{indiciaea99b35f809ef,
  title = {Wafer-level substrate-free low-stress silicon nitride platform for THz metadevices and monolithically integrated narrowband metamaterial absorbers},
  author = {Zhigang Li and Jiarui Jia and Wenjing Jiang and Wen Ou and Bo Wang and Xubiao Peng and Qing Zhao},
  year = {2022},
  url = {https://arxiv.org/abs/2210.09508},
  note = {Source identifier: 2210.09508}
}