TY  - RPRT
TI  - Wafer-level substrate-free low-stress silicon nitride platform for THz metadevices and monolithically integrated narrowband metamaterial absorbers
AU  - Zhigang Li
AU  - Jiarui Jia
AU  - Wenjing Jiang
AU  - Wen Ou
AU  - Bo Wang
AU  - Xubiao Peng
AU  - Qing Zhao
PY  - 2022
UR  - https://arxiv.org/abs/2210.09508
ID  - 2210.09508
ER  -