@misc{indiciae551ba611f2c0, title = {Self- and Mutual Inductance of NbN and Bilayer NbN/Nb Inductors in Planarized Fabrication Process With Nb Ground Planes}, author = {Sergey K. Tolpygo and Evan B. Golden and Terence J. Weir and Vladimir Bolkhovsky and Ravi Rastogi}, year = {2023}, doi = {10.1109/tasc.2023.3244772}, url = {https://arxiv.org/abs/2210.10705}, note = {Source identifier: 2210.10705} }