TY - RPRT TI - Self- and Mutual Inductance of NbN and Bilayer NbN/Nb Inductors in Planarized Fabrication Process With Nb Ground Planes AU - Sergey K. Tolpygo AU - Evan B. Golden AU - Terence J. Weir AU - Vladimir Bolkhovsky AU - Ravi Rastogi PY - 2023 DO - 10.1109/tasc.2023.3244772 UR - https://arxiv.org/abs/2210.10705 ID - 2210.10705 ER -