@misc{indiciae5dbbef96bb90,
  title = {Ion-beam Assisted Sputtering of Titanium Nitride Thin Films},
  author = {Timothy Draher and Tomas Polakovic and Juliang Li and Yi Li and Ulrich Welp and Jidong Samuel Jiang and John Pearson and Whitney Armstrong and Zein-Eddine Meziani and Clarence Chang and Wai-Kwong Kwok and Zhili Xiao and Valentine Novosad},
  year = {2023},
  doi = {10.1038/s41598-023-31549-0},
  url = {https://arxiv.org/abs/2210.15065},
  note = {Source identifier: 2210.15065}
}