@misc{indiciaef7734c68c798,
  title = {Introduction of deep level impurities, S, Se, and Zn, into Si wafers for high-temperature operation of a Si qubit},
  author = {Yoshisuke Ban and Kimihiko Kato and Shota Iizuka and Shigenori Murakami and Koji Ishibashi and Satoshi Moriyama and Takahiro Mori and Keiji Ono},
  year = {2022},
  doi = {10.35848/1347-4065/acae60},
  url = {https://arxiv.org/abs/2210.15955},
  note = {Source identifier: 2210.15955}
}