TY  - RPRT
TI  - Introduction of deep level impurities, S, Se, and Zn, into Si wafers for high-temperature operation of a Si qubit
AU  - Yoshisuke Ban
AU  - Kimihiko Kato
AU  - Shota Iizuka
AU  - Shigenori Murakami
AU  - Koji Ishibashi
AU  - Satoshi Moriyama
AU  - Takahiro Mori
AU  - Keiji Ono
PY  - 2022
DO  - 10.35848/1347-4065/acae60
UR  - https://arxiv.org/abs/2210.15955
ID  - 2210.15955
ER  -