@misc{indiciae7f5fe7921e1b, title = {Wafer-Scale Growth of Sb2Te3 Films via Low-Temperature ALD for Self-Powered Photodetector}, author = {Jun Yang and Jianzhu Li and Amin Bahrami and Noushin Nasiri and Sebastian Lehmann and Magdalena Ola Cichocka and Samik Mukherjee and Kornelius Nielsch}, year = {2022}, url = {https://arxiv.org/abs/2210.17144}, note = {Source identifier: 2210.17144} }