TY  - RPRT
TI  - Deep Learning based Defect classification and detection in SEM images: A Mask R-CNN approach
AU  - Bappaditya Dey
AU  - Enrique Dehaerne
AU  - Kasem Khalil
AU  - Sandip Halder
AU  - Philippe Leray
AU  - Magdy A. Bayoumi
PY  - 2022
UR  - https://arxiv.org/abs/2211.02185
ID  - 2211.02185
ER  -