@misc{indiciae54cb7a43855e, title = {Ultrafast laser welding of silicon}, author = {Maxime Chambonneau and Qingfeng Li and Markus Blothe and Stefan Nolte}, year = {2022}, doi = {10.1002/adpr.202200300}, url = {https://arxiv.org/abs/2211.03518}, note = {Source identifier: 2211.03518} }