@misc{indiciae75caed12fc92,
  title = {Electron Density and Temperature in NIO1 RF Source Operated in Oxygen and Argon},
  author = {M. Barbisan and B. Zaniol and M. Cavenago and R. Pasqualotto and G. Serianni and M. Zanini},
  year = {2022},
  doi = {10.1063/1.4995751},
  url = {https://arxiv.org/abs/2211.04082},
  note = {Source identifier: 2211.04082}
}