TY  - RPRT
TI  - Electron Density and Temperature in NIO1 RF Source Operated in Oxygen and Argon
AU  - M. Barbisan
AU  - B. Zaniol
AU  - M. Cavenago
AU  - R. Pasqualotto
AU  - G. Serianni
AU  - M. Zanini
PY  - 2022
DO  - 10.1063/1.4995751
UR  - https://arxiv.org/abs/2211.04082
ID  - 2211.04082
ER  -