@misc{indiciae8cc208f0094f,
  title = {Physics-separating artificial neural networks for predicting initial stages of Al sputtering and thin film deposition in Ar plasma discharges},
  author = {Tobias Gergs and Thomas Mussenbrock and Jan Trieschmann},
  year = {2022},
  doi = {10.1088/1361-6463/acb6a4},
  url = {https://arxiv.org/abs/2211.04796},
  note = {Source identifier: 2211.04796}
}