TY  - RPRT
TI  - Physics-separating artificial neural networks for predicting initial stages of Al sputtering and thin film deposition in Ar plasma discharges
AU  - Tobias Gergs
AU  - Thomas Mussenbrock
AU  - Jan Trieschmann
PY  - 2022
DO  - 10.1088/1361-6463/acb6a4
UR  - https://arxiv.org/abs/2211.04796
ID  - 2211.04796
ER  -