TY  - RPRT
TI  - Electron dynamics in planar radio frequency magnetron plasmas: III. Comparison of experimental investigations of power absorption dynamics to simulation results
AU  - Birk Berger
AU  - Denis Eremin
AU  - Moritz Oberberg
AU  - Dennis Engel
AU  - Christian Wölfel
AU  - Quan-Zhi Zhang
AU  - Peter Awakowicz
AU  - Jan Lunze
AU  - Ralf Peter Brinkmann
AU  - Julian Schulze
PY  - 2022
DO  - 10.1088/1361-6595/acc480
UR  - https://arxiv.org/abs/2211.05479
ID  - 2211.05479
ER  -