@misc{indiciae2328663afba2,
  title = {Density control of GaN nanowires at the wafer scale using self-assembled SiN\$\_x\$ patches on sputtered TiN(111)},
  author = {Thomas Auzelle and Miriam Oliva and Philipp John and Manfred Ramsteiner and Lutz Geelhaar and Oliver Brandt},
  year = {2023},
  doi = {10.1088/1361-6528/acdde8},
  url = {https://arxiv.org/abs/2211.06274},
  note = {Source identifier: 2211.06274}
}