TY  - RPRT
TI  - Density control of GaN nanowires at the wafer scale using self-assembled SiN$_x$ patches on sputtered TiN(111)
AU  - Thomas Auzelle
AU  - Miriam Oliva
AU  - Philipp John
AU  - Manfred Ramsteiner
AU  - Lutz Geelhaar
AU  - Oliver Brandt
PY  - 2023
DO  - 10.1088/1361-6528/acdde8
UR  - https://arxiv.org/abs/2211.06274
ID  - 2211.06274
ER  -