@misc{indiciae4c6a29f349a1,
  title = {Phase-probability shaping for speckle-free holographic lithography},
  author = {Dong Zhao and Weiwei Fu and Ziqin Li and Jun He and Kun Huang},
  year = {2022},
  url = {https://arxiv.org/abs/2211.09962},
  note = {Source identifier: 2211.09962}
}