@misc{indiciaeb86a428047a2,
  title = {Phase mask pinholes as spatial filters for laser interference lithography},
  author = {Giovanna Capraro and Maxim Lipkin and Michael Möller and Jens Bolten and Max C. Lemme},
  year = {2022},
  doi = {10.1002/adpr.202300225},
  url = {https://arxiv.org/abs/2211.09985},
  note = {Source identifier: 2211.09985}
}