TY  - RPRT
TI  - Phase mask pinholes as spatial filters for laser interference lithography
AU  - Giovanna Capraro
AU  - Maxim Lipkin
AU  - Michael Möller
AU  - Jens Bolten
AU  - Max C. Lemme
PY  - 2022
DO  - 10.1002/adpr.202300225
UR  - https://arxiv.org/abs/2211.09985
ID  - 2211.09985
ER  -