@misc{indiciaeb0dbc1d545dc,
  title = {Probing the Atomic Arrangement of Sub-Surface Dopants in a Silicon Quantum Device Platform},
  author = {Håkon I. Røst and Ezequiel Tosi and Frode S. Strand and Anna Cecilie Åsland and Paolo Lacovig and Silvano Lizzit and Justin W. Wells},
  year = {2022},
  doi = {10.1021/acsami.2c23011},
  url = {https://arxiv.org/abs/2211.10096},
  note = {Source identifier: 2211.10096}
}