TY - RPRT TI - High-Q trampoline resonators from strained crystalline InGaP for integrated free-space optomechanics AU - Sushanth Kini Manjeshwar AU - Anastasiia Ciers AU - Fia Hellman AU - Jürgen Bläsing AU - André Strittmater AU - Witlef Wieczorek PY - 2023 DO - 10.1021/acs.nanolett.3c00996 UR - https://arxiv.org/abs/2211.12469 ID - 2211.12469 ER -