@misc{indiciaeb5e5aa0abaf5,
  title = {Application of Convolutional Neural Network to TSOM Images for Classification of 6 nm Node Patterned Defects},
  author = {Ravikiran Attota},
  year = {2022},
  url = {https://arxiv.org/abs/2211.12596},
  note = {Source identifier: 2211.12596}
}