@misc{indiciae84c865027df1,
  title = {Manufacturing high-Q superconducting α-tantalum resonators on silicon wafers},
  author = {D. P. Lozano and M. Mongillo and X. Piao and S. Couet and D. Wan and Y. Canvel and A. M. Vadiraj and Ts. Ivanov and J. Verjauw and R. Acharya and J. Van Damme and F. A. Mohiyaddin and J. Jussot and P. P. Gowda and A. Pacco and B. Raes and J. Van de Vondel and I. P. Radu and B. Govoreanu and J. Swerts and A. Potočnik and K. De Greve},
  year = {2022},
  doi = {10.1088/2633-4356/ad4b8c},
  url = {https://arxiv.org/abs/2211.16437},
  note = {Source identifier: 2211.16437}
}