@misc{indiciae4ac7fe3dc64b,
  title = {Semiconductor Defect Pattern Classification by Self-Proliferation-and-Attention Neural Network},
  author = {YuanFu Yang and Min Sun},
  year = {2022},
  doi = {10.1109/tsm.2021.3131597},
  url = {https://arxiv.org/abs/2212.00345},
  note = {Source identifier: 2212.00345}
}