TY - RPRT TI - Nondestructive KPFM-assisted Quality Control in Fabrication of GaAs High-Speed Electronics AU - Alexander Shurakov AU - Natalia Kaurova AU - Ivan Belikov AU - Tatyana Zilberley AU - Anatoliy Prikhodko AU - Boris Voronov AU - Gregory Gol'tsman PY - 2022 UR - https://arxiv.org/abs/2212.01474 ID - 2212.01474 ER -