@misc{indiciaeb8610458d422,
  title = {Vibration suppression of a state-of-the-art wafer gripper},
  author = {M. El Ajjaj and M. B. Kaczmarek and M. A. C. C. van den Hurk and S. H. HosseinNia},
  year = {2022},
  url = {https://arxiv.org/abs/2212.01854},
  note = {Source identifier: 2212.01854}
}