@misc{indiciae3cf61bff5c0c, title = {Enhancing the Electron Mobility in Si-doped (010) \$β\$-Ga\$\_2\$O\$\_3\$ films with Low-Temperature Buffer Layers}, author = {Arkka Bhattacharyya and Carl Peterson and Takeki Itoh and Saurav Roy and Jacqueline Cooke and Steve Rebollo and Praneeth Ranga and Berardi Sensale-Rodriguez and Sriram Krishnamoorthy}, year = {2023}, url = {https://arxiv.org/abs/2212.02062}, note = {Source identifier: 2212.02062} }