TY - RPRT TI - Enhancing the Electron Mobility in Si-doped (010) $β$-Ga$_2$O$_3$ films with Low-Temperature Buffer Layers AU - Arkka Bhattacharyya AU - Carl Peterson AU - Takeki Itoh AU - Saurav Roy AU - Jacqueline Cooke AU - Steve Rebollo AU - Praneeth Ranga AU - Berardi Sensale-Rodriguez AU - Sriram Krishnamoorthy PY - 2023 UR - https://arxiv.org/abs/2212.02062 ID - 2212.02062 ER -