@misc{indiciae5b47d3739a0f,
  title = {MEMS for Photonic Integrated Circuits},
  author = {Carlos Errando-Herranz and Alain Yuji Takabayashi and Pierre Edinger and Hamed Sattari and Kristinn B. Gylfason and Niels Quack},
  year = {2022},
  doi = {10.1109/jstqe.2019.2943384},
  url = {https://arxiv.org/abs/2212.05169},
  note = {Source identifier: 2212.05169}
}