TY  - RPRT
TI  - MEMS for Photonic Integrated Circuits
AU  - Carlos Errando-Herranz
AU  - Alain Yuji Takabayashi
AU  - Pierre Edinger
AU  - Hamed Sattari
AU  - Kristinn B. Gylfason
AU  - Niels Quack
PY  - 2022
DO  - 10.1109/jstqe.2019.2943384
UR  - https://arxiv.org/abs/2212.05169
ID  - 2212.05169
ER  -