@misc{indiciae8e0cf5db3ccf,
  title = {Deep multilevel wet etching of fused silica glass microstructures in BOE solution},
  author = {T. G. Konstantinova and M. M. Andronic and D. A. Baklykov and V. E. Stukalova and D. A. Ezenkova and E. V. Zikiy and M. V. Bashinova and A. A. Solovev and E. S. Lotkov and I. A. Ryzhikov and I. A. Rodionov},
  year = {2022},
  url = {https://arxiv.org/abs/2212.06699},
  note = {Source identifier: 2212.06699}
}