@misc{indiciae510896245c43, title = {Design of a 3000-pixel transition-edge sensor x-ray spectrometer for microcircuit tomography}, author = {Paul Szypryt and Douglas A. Bennett and William J. Boone and Amber L. Dagel and Gabriella Dalton and W. Bertrand Doriese and Joseph W. Fowler and Edward J. Garboczi and Johnathon D. Gard and Gene C. Hilton and Jozsef Imrek and Edward S. Jimenez and Vincent Y. Kotsubo and Kurt Larson and Zachary H. Levine and John A. B. Mates and Daniel McArthur and Kelsey M. Morgan and Nathan Nakamura and Galen C. O'Neil and Nathan J. Ortiz and Christine G. Pappas and Carl D. Reintsema and Daniel R. Schmidt and Daniel S. Swetz and Kyle R. Thompson and Joel N. Ullom and Christopher Walker and Joel C. Weber and Abigail L. Wessels and Jason W. Wheeler}, year = {2022}, doi = {10.1109/tasc.2021.3052723}, url = {https://arxiv.org/abs/2212.07460}, note = {Source identifier: 2212.07460} }