@misc{indiciae65984fa823df,
  title = {Heterostructure films of SiO\$\_2\$ and HfO\$\_2\$ for high power laser optics prepared by plasma-enhanced atomic layer deposition},
  author = {Shawon Alam and Pallabi Paul and Vivek Beladiya and Olaf Stenzel and Marcus Trost and Steffen Wilbrandt and Sven Schroeder and Gabor Matthaeus and Stefan Nolte and Sebastian Riese and Felix Otto and Torsten Fritz and Alexander Gottwald and Adriana Szeghalmi},
  year = {2022},
  url = {https://arxiv.org/abs/2212.08430},
  note = {Source identifier: 2212.08430}
}