@misc{indiciaeba1b2fd7b30c, title = {Atomically Thin Metal-Dielectric Heterostructures by Atomic Layer Deposition}, author = {Pallabi Paul and Paul Schmitt and Vilborg Vala Sigurjonsdottir and Kevin Hanemann and Nadja Felde and Sven Schroeder and Felix Otto and Marco Gruenewald and Torsten Fritz and Vladimir Roddatis and Andreas Tuennermann and Adriana Szeghalmi}, year = {2022}, url = {https://arxiv.org/abs/2212.08435}, note = {Source identifier: 2212.08435} }