@misc{indiciaea2b9467ff651,
  title = {Nanomechanical resonators fabricated by atomic layer deposition on suspended 2D materials},
  author = {Hanqing Liu and Saravana B. Basuvalingam and Saurabh Lodha and Ageeth A. Bol and Herre S. J. van der Zant and Peter G. Steeneken and G. J. Verbiest},
  year = {2022},
  url = {https://arxiv.org/abs/2212.08449},
  note = {Source identifier: 2212.08449}
}