TY  - RPRT
TI  - Nanomechanical resonators fabricated by atomic layer deposition on suspended 2D materials
AU  - Hanqing Liu
AU  - Saravana B. Basuvalingam
AU  - Saurabh Lodha
AU  - Ageeth A. Bol
AU  - Herre S. J. van der Zant
AU  - Peter G. Steeneken
AU  - G. J. Verbiest
PY  - 2022
UR  - https://arxiv.org/abs/2212.08449
ID  - 2212.08449
ER  -