@misc{indiciae4efb6a91ffa7,
  title = {Modeling of very high frequency large-electrode capacitively coupled plasmas with a fully electromagnetic particle-in-cell code},
  author = {D. Eremin and E. Kemaneci and M. Matsukuma and T. Mussenbrock and R. P. Brinkmann},
  year = {2022},
  doi = {10.1088/1361-6595/accecb},
  url = {https://arxiv.org/abs/2212.08836},
  note = {Source identifier: 2212.08836}
}