TY  - RPRT
TI  - Modeling of very high frequency large-electrode capacitively coupled plasmas with a fully electromagnetic particle-in-cell code
AU  - D. Eremin
AU  - E. Kemaneci
AU  - M. Matsukuma
AU  - T. Mussenbrock
AU  - R. P. Brinkmann
PY  - 2022
DO  - 10.1088/1361-6595/accecb
UR  - https://arxiv.org/abs/2212.08836
ID  - 2212.08836
ER  -