@misc{indiciaee130c0788959,
  title = {Wafer-Scale Fabrication of Hierarchically Porous Silicon and Silica Glass by Active Nanoparticle-Assisted Chemical Etching and Pseudomorphic Thermal Oxidation},
  author = {Stella Gries and Manuel Brinker and Berit Zeller-Plumhoff and Dagmar Rings and Tobias Krekeler and Imke Greving and Patrick Huber},
  year = {2022},
  doi = {10.1002/smll.202206842},
  url = {https://arxiv.org/abs/2212.10160},
  note = {Source identifier: 2212.10160}
}