TY  - RPRT
TI  - Wafer-Scale Fabrication of Hierarchically Porous Silicon and Silica Glass by Active Nanoparticle-Assisted Chemical Etching and Pseudomorphic Thermal Oxidation
AU  - Stella Gries
AU  - Manuel Brinker
AU  - Berit Zeller-Plumhoff
AU  - Dagmar Rings
AU  - Tobias Krekeler
AU  - Imke Greving
AU  - Patrick Huber
PY  - 2022
DO  - 10.1002/smll.202206842
UR  - https://arxiv.org/abs/2212.10160
ID  - 2212.10160
ER  -