@misc{indiciaec998f44570a7, title = {Comphy v3.0 -- A Compact-Physics Framework for Modeling Charge Trapping Related Reliability Phenomena in MOS Devices}, author = {Dominic Waldhoer and Christian Schleich and Jakob Michl and Alexander Grill and Dieter Claes and Alexander Karl and Theresia Knobloch and Gerhard Rzepa and Jacopo Franco and Ben Kaczer and Michael Waltl and Tibor Grasser}, year = {2022}, doi = {10.1016/j.microrel.2023.115004}, url = {https://arxiv.org/abs/2212.11547}, note = {Source identifier: 2212.11547} }